InGaAsP/InP based Flattened Ring Resonators with Etched Beam Splitters
نویسندگان
چکیده
A novel flattened ring resonator design utilizing Etched Beam Splitters (EBS) in InGaAsP/InP is proposed and demonstrated. A multiple-thickness hard mask that compensates for RIE-lag realizes waveguides and EBS gaps in a single etch step. ©2009 Optical Society of America OCIS codes: 230.5750 Resonators, 250.5300 Photonic integrated circuits
منابع مشابه
Etched beam splitters in InP/InGaAsP.
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